Fig. 1. Diagram of antireflection micro-nano structure with composite grid. (a) Surface of antireflection micro-nano structure with composite grid; (b) surface of antireflection micro-nano structure

Fig. 2. Three kinds of composite grid structure. (a) Hexagonal grid structure; (b) square grid structure; (c) triangle grid structure

Fig. 3. Optical performance comparison of grid structure with different materials. (a) Comparison of diffraction results; (b) comparison of MTF curves

Fig. 4. Model of antireflection micro-nano structure. (a) 3D model of micro-nano structure surface; (b) parametric diagram of micro-nano structure

Fig. 5. Reflectivity of the antireflection micro-nano structural surface at the wide angle

Fig. 6. Model of grid structure. (a) 3D model of the grid structural surface; (b) parametric diagram of grid structure

Fig. 7. Diffraction comparison of grid structure with different periods

Fig. 8. Diffraction comparison of grid structure with different parameters. (a) Influence of grid width on diffraction; (b) influence of grid height on diffraction

Fig. 9. Diffraction of grid structure at wide angle

Fig. 10. Three grid structure dimensions

Fig. 11. Stress load result of regular hexagonal grid structure. (a) Local enlargement of the structure; (b) stress distribution of the overall structure

Fig. 12. Stress load result of regular square grid structure. (a) Local enlargement of the structure; (b) stress distribution of the overall structure

Fig. 13. Stress load result of regular triangle grid structure. (a) Local enlargement of the structure; (b) stress distribution of the overall structure

Fig. 14. Fabrication process of antireflection micro-nano structure surface with composite grid

Fig. 15. SEM image of antireflection micro-nano structure plane with composite grid

Fig. 16. Section SEM images of antireflection micro-nano structure with composite grid. (a) Enlarged section of antireflection micro-nano structure; (b) enlarged section of grid structure

Fig. 17. Reflectivity of the moth-eye structure with composite grid. (a) Reflectivity comparison of the composite grid moth-eye structure and single moth-eye structure; (b) reflectivity of composite grid moth-eye structure at wide angle

Fig. 18. Comparison between experimental test result and simulation result. (a) Comparison between simulation result and experimental test result at H=2.2 μm; (b) comparison between simulation result and experimental test result at H=2 μm

Fig. 19. Tape stripping equipment

Fig. 20. Macro performance of two samples after tape stripping. (a) Composite grid moth-eye structure sample; (b) single moth-eye structure sample

Fig. 21. SEM images of the composite grid moth-eye structure sample before and after tape test. (a) SEM image of sample before tape test; (b) SEM image of sample after tape test

Fig. 22. SEM images of single moth-eye structure sample before and after tape stripping. (a) SEM image of sample before tape test; (b) SEM image of sample after tape test

Fig. 23. Reflectivity test results before and after tape method. (a) Composite grid moth-eye structure surface; (b) single moth-eye structure surface