Investigation on realtime monitoring technique for laser ablative process

Chinese Journal of Lasers, Volume. 16, Issue 5, 263(1989)

Pan Daren

Author Affiliations

[in Chinese]

show less

References(4)

[1] [1] T. J. Chuang, J. Vac. Sci. Technol., 21, 798 (1982)

[2] [2] В. S. AgrawaJia et al., J. Vac. Sci. Technol. B, 5, 601(1987)

[3] [3] D. Pan et. al., Symposium of MES, 1986 Fail Meeting (Boston, U.S. Α., Dec. 1986)

[4] [4] S. D. Allen et al., J. Appl. Phys., 59, 1653 (1986).

Tools

Get Citation

Copy Citation Text

Pan Daren. Investigation on realtime monitoring technique for laser ablative process[J]. Chinese Journal of Lasers, 1989, 16(5): 263

Download Citation

Paper Information

Category:

Received: Oct. 12, 1987

Accepted: --

Published Online: Aug. 13, 2012

The Author Email:

DOI:

Topics