Fig. 1. Schematic of energy distribution of femtosecond laser

Fig. 2. Schematic of femtosecond laser processing and characterization system

Fig. 3. Flow of LDT measurement using extrapolation method for damage area

Fig. 4. Damage area image processing process

Fig. 5. Fourier filter optimized image

Fig. 6. Fourier filter optimized image

Fig. 7. Laser irradiation and identification of SCD

Fig. 8. Comparison of FE-SEM results of laser irradiation and OM identification of SCD irradiated by laser

Fig. 9. Dependency of SCD D2and lnPavg

Fig. 10. Laser irradiation and identification of MCD

Fig. 11. SEM image of MCD irradiated by femtosecond laser

Fig. 12. 400 µW laser-irradiated MCD AFM image

Fig. 13. Dependency of MCD D2andlnPavg