Journal of Applied Optics, Volume. 42, Issue 5, 796(2021)

Two kinds of making technologies of glass micro-channel arrays and their comparison

Yali WANG1, Kaiyuan CUI1, Shulin LIU2,3、*, Qian ZHANG1, Chonghao LI1, and Xiaofeng LI4
Author Affiliations
  • 1Taiyuan Great Wall Low-Light Micro-Channel Electronic Technology Co.,Ltd., Taiyuan 030032, China
  • 2State Key Laboratory of Nuclear Detection and Nuclear Electronics, Institute of High Energy Physics, Chinese Academy of Sciences, Beijing 100049, China
  • 3University of Chinese Academy of Sciences, Beijing 100049, China
  • 4North Night Vision Technology Co., Ltd., Kunming 650217, China
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    Figures & Tables(10)
    Schematic diagram of row plates byhollow- core method
    Partial enlarged diagram of base of hollow-core glass array
    Inspection picture of the channel wall roughness before polishing
    Diagram of roughness measurement of channel wall after internal polishing
    Photograph of hollow-core fiber
    Blank bar of hollow-core tube filled with filler
    • Table 1. Glass composition of skin-core materials of traditional MCP

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      Table 1. Glass composition of skin-core materials of traditional MCP

      氧化物 mol% SiO2PbOBi2O3ΣR2O* B2O3ZnOAl2O3BaO其它
      注:*ΣR2O为碱金属氧化物的总和,一般选取Na2O、K2O、Rb2O、Cs2O
      皮料玻璃70.010.01.58.0000.58.02.0
      芯料玻璃22.00012.036.08.05.015.02.0
    • Table 2. Comparison of roughness data before and after internal polishing

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      Table 2. Comparison of roughness data before and after internal polishing

      内表面未抛光 粗糙度−3 内表面抛光 粗糙度−5
      图像原始均值/nm−0.000187−0.000331
      图像均值/nm−0.000187−0.000331
      图像Z范围/nm 78922.8
      图像表面积/µm27.704.24
      图像投影表面积/µm24.004.00
      图像表面积差/%92.65.92
      图像Rq/nm 79.92.09
      图像Ra/nm 56.31.67
      图像Rmax/nm 78922.8
    • Table 3. Gains, uniformity and life index of MCP made from different processes

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      Table 3. Gains, uniformity and life index of MCP made from different processes

      电阻/MΩ增益 (工作电压800 v)增益非均匀性/%寿命(按累积拾取电荷量计算)/C
      空芯工艺100~2005 000~15 000≤7~10
      实芯工艺100~2005 000~15 000≤5~10
      传统MCP70~2002 000~10 000≤101~2
    • Table 4. Main performances after making low-light-level image intensifier

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      Table 4. Main performances after making low-light-level image intensifier

      电阻/ 电子增益/ 800 v 增益非均 匀性/% 信噪比 视场 质量
      空芯工艺120~250~500≤10~26一般
      实芯工艺130~260~650≤7~28
      传统MCP100~300~300≤1021~23
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    Yali WANG, Kaiyuan CUI, Shulin LIU, Qian ZHANG, Chonghao LI, Xiaofeng LI. Two kinds of making technologies of glass micro-channel arrays and their comparison[J]. Journal of Applied Optics, 2021, 42(5): 796

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    Paper Information

    Category: OE SYSTEM AND ENGINEERING

    Received: Feb. 23, 2021

    Accepted: --

    Published Online: Oct. 26, 2021

    The Author Email: Shulin LIU (liusl@ihep.ac.cn)

    DOI:10.5768/JAO202142.0501006

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