Research on the Influence of Piezoelectric Substrate Thickness on Surface Acoustic Wave Filters Performance and It’s Improvement Method

HE Chengyong; CHU Mengqun; TAN Fazeng; HU Minglang; TAN Rui; CHEN Wenyuan; ZHANG Xing; LUO Hongfei; XIAO Qiang

doi:10.11977/j.issn.1004-2474.2025.02.007

Piezoelectrics & Acoustooptics, Volume. 47, Issue 2, 234(2025)

Research on the Influence of Piezoelectric Substrate Thickness on Surface Acoustic Wave Filters Performance and It’s Improvement Method

HE Chengyong¹, CHU Mengqun¹, TAN Fazeng¹, HU Minglang¹, TAN Rui¹, CHEN Wenyuan¹, ZHANG Xing¹, LUO Hongfei¹, and XIAO Qiang^1,2

Author Affiliations

¹The 26th Institute of China Electronics Technology Group Corporation, Chongqing 400060, China

²Science and Technology on Analog Integrated Circuit Laboratory, Chongqing 400060, China

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References(2)

[5] [5] KOVACS G, ANHORN M, ENGAN H E, et al. Improved material constants for LiNbO3 and LiTaO3［C］//HI, USA: IEEE Symposium on Ultrasonics, 1990（1）: 435-438.

[8] [8] PLESSKY V. Coupling-of-modes analysis of SAW devices［J］. International Journal of High Speed Electronics and Systems, 2000, 10（4）: 867-947.

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HE Chengyong, CHU Mengqun, TAN Fazeng, HU Minglang, TAN Rui, CHEN Wenyuan, ZHANG Xing, LUO Hongfei, XIAO Qiang. Research on the Influence of Piezoelectric Substrate Thickness on Surface Acoustic Wave Filters Performance and It’s Improvement Method[J]. Piezoelectrics & Acoustooptics, 2025, 47(2): 234

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Paper Information

Received: Jan. 7, 2025

Accepted: Jun. 17, 2025

Published Online: Jun. 17, 2025

The Author Email:

DOI:10.11977/j.issn.1004-2474.2025.02.007

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology