Piezoelectrics & Acoustooptics, Volume. 47, Issue 2, 234(2025)

Research on the Influence of Piezoelectric Substrate Thickness on Surface Acoustic Wave Filters Performance and It’s Improvement Method

HE Chengyong1, CHU Mengqun1, TAN Fazeng1, HU Minglang1, TAN Rui1, CHEN Wenyuan1, ZHANG Xing1, LUO Hongfei1, and XIAO Qiang1,2
Author Affiliations
  • 1The 26th Institute of China Electronics Technology Group Corporation, Chongqing 400060, China
  • 2Science and Technology on Analog Integrated Circuit Laboratory, Chongqing 400060, China
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    LiTaO3 (LT) is an excellent candidate for piezoelectric substrates in surface acoustic wave (SAW)filters. To reduce the manufacturing cost and size of SAW filters, a 0.35 mm thick LT piezoelectric substrate needs to be replaced with one that is 0.25 mm thick. However, using the same design structure deteriorates the performance of the device. To address this issue, this article establishes an electromagnetic simulation model that includes chip bonding adhesive and simulates the electromagnetic characteristics of two different piezoelectric substrate thicknesses(0.25 mm and 0.35 mm) with varying adhesive thicknesses. The adhesive thickness is then optimized by combining electromagnetic and acoustic simulations to improve SAW filter performance. Finally, experiments show that by optimizing the adhesive thickness, the performance of the filter using the 0.25 mm piezoelectric substrate surpasses that of the original filter using the 0.35 mm substrate, thus meeting device specification requirements. This technical solution can be further extended to SAW devices using other piezoelectric substrates.

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    HE Chengyong, CHU Mengqun, TAN Fazeng, HU Minglang, TAN Rui, CHEN Wenyuan, ZHANG Xing, LUO Hongfei, XIAO Qiang. Research on the Influence of Piezoelectric Substrate Thickness on Surface Acoustic Wave Filters Performance and It’s Improvement Method[J]. Piezoelectrics & Acoustooptics, 2025, 47(2): 234

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    Paper Information

    Received: Jan. 7, 2025

    Accepted: Jun. 17, 2025

    Published Online: Jun. 17, 2025

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2025.02.007

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