Laser & Optoelectronics Progress, Volume. 55, Issue 9, 93101(2018)
Effects of Substrate Temperature and Ion Source Energy on Stress of Thin Film
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Hao Shuai, Cui Bifeng, Fang Tianxiao, Wang Yang. Effects of Substrate Temperature and Ion Source Energy on Stress of Thin Film[J]. Laser & Optoelectronics Progress, 2018, 55(9): 93101
Paper Information
Category: Thin Films
Received: Mar. 5, 2018
Accepted: --
Published Online: Sep. 8, 2018
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