Chinese Journal of Lasers, Volume. 39, Issue 11, 1108016(2012)

Measurement of Geometric Error of Rotary Stage System Based on Laser Tracker

Zhang Zhenjiu* and Hu Hong
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    Zhang Zhenjiu, Hu Hong. Measurement of Geometric Error of Rotary Stage System Based on Laser Tracker[J]. Chinese Journal of Lasers, 2012, 39(11): 1108016

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    Paper Information

    Category: measurement and metrology

    Received: May. 2, 2012

    Accepted: --

    Published Online: Oct. 19, 2012

    The Author Email: Zhenjiu Zhang (ajiuhit@hotmail.com)

    DOI:10.3788/cjl201239.1108016

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