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Infrared and Laser Engineering, Volume. 44, Issue 3, 951(2015)

Mesa etching process for InAs/GaSb SLs grown by MBE

Yao Guansheng1,2、*, Zhang Lixue1,3, Zhang Xiangfeng1,2, Zhang Liang1,2, and Zhang Lei1
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    Yao Guansheng, Zhang Lixue, Zhang Xiangfeng, Zhang Liang, Zhang Lei. Mesa etching process for InAs/GaSb SLs grown by MBE[J]. Infrared and Laser Engineering, 2015, 44(3): 951

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    Paper Information

    Category: 光电器件与材料

    Received: Jul. 8, 2014

    Accepted: Aug. 11, 2014

    Published Online: Jan. 26, 2016

    The Author Email: Guansheng Yao (caojian820919@163.com)

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology