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Piezoelectrics & Acoustooptics, Volume. 44, Issue 2, 246(2022)

Study on Diffraction Effects of Photolithography in SAW Devices

MENG Tengfei1, CHEN Xiaoyang2, DUAN Yingli1, YU Haiyang1, ZHOU Peigen1, and WANG Yong’an1
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    [3] [3] TURNER P J,GARCIA B,YANTCHEV V,et al, 5 GHz Band n79 wideband micro acoustic filter using thin lithium niobate membrane[J]. Electronics Letters,2019(55):942-944,

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    MENG Tengfei, CHEN Xiaoyang, DUAN Yingli, YU Haiyang, ZHOU Peigen, WANG Yong’an. Study on Diffraction Effects of Photolithography in SAW Devices[J]. Piezoelectrics & Acoustooptics, 2022, 44(2): 246

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    Paper Information

    Special Issue:

    Received: Mar. 30, 2022

    Accepted: --

    Published Online: Jun. 14, 2022

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2022.02.018

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology