Research and Application of Massive Micropores Water-Assisted Picosecond Laser Processing Technology

Zhu Shuaijie; Zhang Zhaoyang; Chu Songlin; Yang Zhiyi; Zhang Xianshuo; Wang Anbin

doi:10.3788/CJL202047.0302002

Chinese Journal of Lasers, Volume. 47, Issue 3, 302002(2020)

Research and Application of Massive Micropores Water-Assisted Picosecond Laser Processing Technology

Zhu Shuaijie¹, Zhang Zhaoyang^1、*, Chu Songlin², Yang Zhiyi², Zhang Xianshuo¹, and Wang Anbin¹

Author Affiliations

¹School of Mechanical Engineering, Jiangsu University, Zhenjiang, Jiangsu 212013, China

²China Aviation Control System Research Institute, Wuxi, Jiangsu 214063, China

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Figures & Tables(12)

Fig. 1. Schematic of picosecond pulse laser processing system

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Fig. 2. Schematics of laser drilling. (a) Top view; (b) front view

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Fig. 3. Schematics. (a) Schematic of pore size measurement; (b) schematic of hole taper calculation

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Fig. 4. Laser drilling schematics. (a) Direct processing in air; (b) water-assisted processing

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Fig. 5. Curves of microporous taper and material thickness

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Fig. 6. Shapes of small hole exit taken by CCD camera. (a) Direct processing; (b) water-assisted processing

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Fig. 7. SEM images of hole exit. (a) Direct processing; (b) water-assisted processing

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Fig. 8. SEM images and EDS analysis of small hole inlet. (a) Direct processing; (b) water-assisted processing

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Fig. 9. SEM images and physical maps of sieve net. (a) Direct processing; (b) water-assisted processing; (c) sheet deformation comparison; (d) physical photo of sieve net

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Table 1. Orthogonal experimental parameters
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Table 1. Orthogonal experimental parameters
Machining Parameter Abbreviation Level
1 2 3 4
Laser power /W P 7 10 13 16
Pulse frequency /MHz f 0.5 1 1.5 2
Scanning velocity /(mm·s^-1) v 1000 1500 2000 2500
Element number n 30 40 50 60
Defocusing amount /mm z -0.02 0 0.02 0.04

Table 2. Orthogonal design and taper data

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Table 2. Orthogonal design and taper data

Test No.	Influence factor					Taper /(°)
Test No.		P	f	v	n	z
1	1	1	1	1	1	12.44
2	1	2	2	2	2	10.94
3	1	3	3	3	3	11.61
4	1	4	4	4	4	11.62
5	2	1	2	3	4	9.87
6	2	2	1	4	3	10.08
7	2	3	4	1	2	10.85
8	2	4	3	2	1	11.65
9	3	1	3	4	2	8.01
10	3	2	4	3	1	10.04
11	3	3	1	2	4	9.63
12	3	4	2	1	3	11.27
13	4	1	4	2	3	10.64
14	4	2	3	1	4	9.71
15	4	3	2	4	1	10.01
16	4	4	1	3	2	10.24

Table 3. Average response and effect difference of taper at four levels of each factor

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Table 3. Average response and effect difference of taper at four levels of each factor

Horizontal mean value	Laser power P	Pulse frequency f	Scanning velocity v	Element number n	Defocusing amount z
K₁_j	11.6539	10.5976	10.5976	11.0663	11.0360
K₂_j	10.6112	10.1953	10.5240	10.7160	10.0082
K₃_j	9.7381	10.5272	10.2452	10.4411	10.9006
K₄_j	10.1504	11.1915	10.7868	9.9302	10.2089
R_j	7.6634	3.9848	2.1666	4.5442	4.1114
Influence order	1	4	5	2	3

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Zhu Shuaijie, Zhang Zhaoyang, Chu Songlin, Yang Zhiyi, Zhang Xianshuo, Wang Anbin. Research and Application of Massive Micropores Water-Assisted Picosecond Laser Processing Technology[J]. Chinese Journal of Lasers, 2020, 47(3): 302002

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