Chinese Optics Letters, Volume. 3, Issue 5, 05275(2005)
Fabrication of silica-on-silicon planar lightwave circuits by PECVD and ECR
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Libing Zhou, Fengguang Luo, Mingcui Cao, "Fabrication of silica-on-silicon planar lightwave circuits by PECVD and ECR," Chin. Opt. Lett. 3, 05275 (2005)
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