Fig. 1. Schematic diagram of the modulation of surface shape by stacked piezoelectric piston actuators: (a) demonstration of piston-type piezoelectric actuators from the side view; (b) arrangement of actuator electrodes at the bottom of the mirror; (c) exploded view of the mirror; (d) mirror with the gold film measured by profile.

Fig. 2. (a) Design drawing of the clamping and adjusting mechanism of the K-B mirror. (b) 3D exploded view of the vertical deflecting mirror. (c) Photograph of the piezoelectric actuators sticking on a thick stainless steel block.

Fig. 3. Logic diagram of the piezoelectric ceramic control process.

Fig. 4. Ex situ experiments for (a) horizontal deflecting and (b) vertical deflecting mirrors by using (c) a laser interferometer with (d) the high-frequency data acquisition software IDS Feature: wave basic.

Fig. 5. (a) The amplitude of mirror surfaces for different actuators for two mirrors and (b) the amplitude of the 17th actuator versus different frequencies.

Fig. 6. Three distinct deformation modes for actuator modulation.

Fig. 7. Schematic diagram of the optical path for single-slit diffraction.

Fig. 8. The (a) visibility and (b) contrast of imaging at different PV vibrational amplitudes from 2 to 18 nm vary with the increase in the sampling number.

Fig. 9. Comparison of the contrasts with different modulation schemes.

Fig. 10. Comparison of the (a) initial light spot and the spot after (b) 5, (c) 100 and (d) 500 times of homogenization and their contrasts; (e) the visibility and contrast with the increase of sampling number.

Fig. 11. Photos of (a) the K-B system and (b) the overall experimental layout.

Fig. 12. Single-slit diffraction along the (a) vertical and (b) horizontal directions with the increase of the action voltage.

Fig. 13. Visibility of the single-slit diffraction with the increase of the random maximum voltage.

Fig. 14. Imaging with the speckles while (a) no voltage applied and maximum (b) 10 V, (c) 30 V and (d) 50 V applied; (e) variation in the contrast of the images with the increase of the maximum voltage.