[1] C Cummins, R Lundy, JJ Walsh, V Ponsinet, G Fleury et al. Enabling future nanomanufacturing through block copolymer self-assembly: a review. Nano Today, 35, 100936(2020).

[2] YF Xiong, F Xu. Multifunctional integration on optical fiber tips: challenges and opportunities. Adv Photonics, 2, 064001(2020).

[3] AK Grebenko, KA Motovilov, AV Bubis, AG Nasibulin. Gentle patterning approaches toward compatibility with bio-organic materials and their environmental aspects. Small, 18, 2200476(2022).

[4] L Wang, E Kirk, C Wäckerlin, CW Schneider, M Hojeij et al. Nearly amorphous Mo-N gratings for ultimate resolution in extreme ultraviolet interference lithography. Nanotechnology, 25, 235305(2014).

[5] D Ray, HC Wang, J Kim, C Santschi, OJF Martin. A low-temperature annealing method for alloy nanostructures and metasurfaces: unlocking a novel degree of freedom. Adv Mater, 34, 2108225(2022).

[6] H Karakachian, P Rosenzweig, TTN Nguyen, B Matta, AA Zakharov et al. Periodic nanoarray of graphene pn-junctions on silicon carbide obtained by hydrogen intercalation. Adv Funct Mater, 32, 2109839(2022).

[7] A Wolf, A Dostovalov, K Bronnikov, M Skvortsov, S Wabnitz et al. Advances in femtosecond laser direct writing of fiber Bragg gratings in multicore fibers: technology, sensor and laser applications. Opto-Electron Adv, 5, 210055(2022).

[8] ZC Ma, YL Zhang, B Han, QD Chen, HB Sun. Femtosecond-laser direct writing of metallic micro/nanostructures: from fabrication strategies to future applications. Small Methods, 2, 1700413(2018).

[9] L Qin, YQ Huang, F Xia, L Wang, JQ Ning et al. 5 nm nanogap electrodes and arrays by super-resolution laser lithography. Nano Lett, 20, 4916-4923(2020).

[10] ZY Lin, LF Ji, MH Hong. Approximately 30 nm nanogroove formation on single crystalline silicon surface under pulsed nanosecond laser irradiation. Nano Lett, 22, 7005-7010(2022).

[11] JQ Zhang, Y Gao, C Li, K Ju, JP Tan et al. Laser direct writing of flexible antenna sensor for strain and humidity sensing. Opto-Electron Eng, 49, 210316(2022).

[12] ZC Ma, YL Zhang, B Han, XY Hu, CH Li et al. Femtosecond laser programmed artificial musculoskeletal systems. Nat Commun, 11, 4536(2020).

[13] N Livakas, E Skoulas, E Stratakis. Omnidirectional iridescence via cylindrically-polarized femtosecond laser processing. Opto-Electron Adv, 3, 190035(2020).

[14] YL Zhang, Y Tian, H Wang, ZC Ma, DD Han et al. Dual-3D femtosecond laser nanofabrication enables dynamic actuation. ACS Nano, 13, 4041-4048(2019).

[15] SK Saha, DE Wang, VH Nguyen, YN Chang, JS Oakdale et al. Scalable submicrometer additive manufacturing. Science, 366, 105-109(2019).

[16] K Sugioka, Y Cheng. Ultrafast lasers-reliable tools for advanced materials processing. Light Sci Appl, 3, e149(2014).

[17] ZY Lin, MH Hong. Femtosecond laser precision engineering: from micron, submicron, to nanoscale. Ultrafast Sci, 2021, 9783514(2021).

[18] HT Wang, CL Hao, H Lin, YT Wang, T Lan et al. Generation of super-resolved optical needle and multifocal array using graphene oxide metalenses. Opto-Electron Adv, 4, 200031(2021).

[19] WP Zhou, S Bai, ZW Xie, MW Liu, AM Hu. Research progress of laser direct writing fabrication of metal and carbon micro/nano structures and devices. Opto-Electron Eng, 49, 210330(2022).

[20] Y Lin, MH Hong, WJ Wang, YZ Law, TC Chong. Sub-30 nm lithography with near-field scanning optical microscope combined with femtosecond laser. Appl Phys A, 80, 461-465(2005).

[21] Y Li, MH Hong. Parallel laser micro/nano-processing for functional device fabrication. Laser Photonics Rev, 14, 1900062(2020).

[22] L Chen, KQ Cao, YL Li, JK Liu, SA Zhang et al. Large-area straight, regular periodic surface structures produced on fused silica by the interference of two femtosecond laser beams through cylindrical lens. Opto-Electron Adv, 4, 200036(2021).

[23] LJ Li, RR Gattass, E Gershgoren, H Hwang, JT Fourkas. Achieving λ/20 resolution by one-color initiation and deactivation of polymerization. Science, 324, 910-913(2009).

[24] ZZ Li, L Wang, H Fan, YH Yu, QD Chen et al. O-FIB: far-field-induced near-field breakdown for direct nanowriting in an atmospheric environment. Light Sci Appl, 9, 41(2020).

[25] ZY Lin, HG Liu, LF Ji, WX Lin, MH Hong. Realization of ~10 nm features on semiconductor surfaces via femtosecond laser direct patterning in far field and in ambient air. Nano Lett, 20, 4947-4952(2020).

[26] ZQ Li, O Allegre, L Li. Realising high aspect ratio 10 nm feature size in laser materials processing in air at 800 nm wavelength in the far-field by creating a high purity longitudinal light field at focus. Light Sci Appl, 11, 339(2022).

[27] GX Wu, Y Zhou, MH Hong. Sub-50 nm optical imaging in ambient air with 10× objective lens enabled by hyper-hemi-microsphere. Light Sci Appl, 12, 49(2023).

[28] ZY Lin, LF Ji, L Li, J Liu, Y Wu et al. Laser microsphere lens array fabrication of micro/nanostructures with tunable enhanced SERS behavior in dipole superposition Plasmon mode. IEEE Photonics J, 9, 2700511(2017).

[29] D Feng, D Weng, B Wang, JD Wang. Laser pulse number dependent nanostructure evolution by illuminating self-assembled microsphere array. J Appl Phys, 122, 243102(2017).

[30] CS Lim, MH Hong, Y Lin, GX Chen, A Senthil Kumar et al. Sub-micron surface patterning by laser irradiation through microlens arrays. J Mater Process Technol, 192–193, 328-333(2007).

[31] A Jacassi, F Tantussi, M Dipalo, C Biagini, N Maccaferri et al. Scanning probe photonic nanojet lithography. ACS Appl Mater Interfaces, 9, 32386-32393(2017).

[32] B Yan, LY Yue, J Norman Monks, XB Yang, DX Xiong et al. Superlensing plano-convex-microsphere (PCM) lens for direct laser nano-marking and beyond. Opt Lett, 45, 1168-1171(2020).

[33] H Luo, HB Yu, YD Wen, JC Zheng, XD Wang et al. Direct writing of silicon oxide nanopatterns using photonic nanojets. Photonics, 8, 152(2021).

[34] A Chimmalgi, TY Choi, CP Grigoropoulos, K Komvopoulos. Femtosecond laser aperturless near-field nanomachining of metals assisted by scanning probe microscopy. Appl Phys Lett, 82, 1146-1148(2003).

[35] LW Chen, Y Zhou, Y Li, MH Hong. Microsphere enhanced optical imaging and patterning: from physics to applications. Appl Phys Rev, 6, 021304(2019).

[36] Y Zhou, MH Hong, JYH Fuh, L Lu, BS Lukyanchuk et al. Near-field enhanced femtosecond laser nano-drilling of glass substrate. J Alloys Compd, 449, 246-249(2008).

[37] WL Dong, HL Liu, JK Behera, L Lu, RJH Ng et al. Wide bandgap phase change material tuned visible photonics. Adv Funct Mater, 29, 1806181(2019).

[38] L Lu, ZG Dong, F Tijiptoharsono, RJH Ng, HT Wang et al. Reversible tuning of Mie resonances in the visible spectrum. ACS Nano, 15, 19722-19732(2021).

[39] C Choi, SE Mun, J Sung, K Choi, SY Lee et al. Hybrid state engineering of phase-change metasurface for all-optical cryptography. Adv Funct Mater, 31, 2007210(2021).

[40] H Iwase, S Kokubo, S Juodkazis, H Misawa. Suppression of ripples on ablated Ni surface via a polarization grating. Opt Express, 17, 4388-4396(2009).

[41] V Mizeikis, E Kowalska, S Juodkazis. Resonant localization, enhancement, and polarization of optical fields in nano-scale interface regions for photo-catalytic applications. J Nanosci Nanotechnol, 11, 2814-2822(2011).

[42] W Kaiser, CGB Garrett. Two-photon excitation in CaF2: Eu2+. Phys Rev Lett, 7, 229-231(1961).

[43] M Malinauskas, M Farsari, A Piskarskas, S Juodkazis. Ultrafast laser nanostructuring of photopolymers: a decade of advances. Phys Rep, 533, 1-31(2013).

[44] W Denk, JH Strickler, WW Webb. Two-photon laser scanning fluorescence microscopy. Science, 248, 73-76(1990).

[45] S Kawata, HB Sun, T Tanaka, K Takada. Finer features for functional microdevices. Nature, 412, 697-698(2001).

[46] K Sugioka, Y Cheng. Femtosecond laser three-dimensional micro- and nanofabrication. Appl Phys Rev, 1, 041303(2014).

[47] AP Joglekar, HH Liu, E Meyhöfer, G Mourou, AJ Hunt. Optics at critical intensity: applications to nanomorphing. Proc Natl Acad Sci USA, 101, 5856-5861(2004).

[48] F Jin, J Liu, YY Zhao, XZ Dong, ML Zheng et al. λ/30 inorganic features achieved by multi-photon 3D lithography. Nat Commun, 13, 1357(2022).

[49] DE Roberts, A du Plessis, LR Botha. Femtosecond laser ablation of silver foil with single and double pulses. Appl Surf Sci, 256, 1784-1792(2010).

[50] CP Liu, HE Wang, TW Ng, ZH Chen, WF Zhang et al. Hybrid photovoltaic cells based on ZnO/Sb2S3/P3HT heterojunctions. Phys Status Solidi B, 249, 627-633(2012).

[51] Y Zhou, MH Hong. Formation of a three-dimensional bottle beam via an engineered microsphere. Photonics Res, 9, 1598-1606(2021).

[52] Y Zhou, R Ji, JH Teng, MH Hong. Wavelength-tunable focusing via a Fresnel zone microsphere. Opt Lett, 45, 852-855(2020).