Microelectronics, Volume. 51, Issue 4, 598(2021)

Modeling and Verification of a Symmetrical Square Enclosed Layout Transistor NMOS Device

JIANG Pengkai, LUO Ping, WU Yucao, and LING Rongxun
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    A symmetrical square enclosed layout transistor (SS-ELT) NMOS device structure was introduced. Equivalent aspect ratio W/L model and total ionizing dose (TID) radiation-hard performance of the SS-ELT NMOS were also studied. Based on regional decomposition and conformal mapping, et al., the model of equivalent aspect ratio W/L was derived. The chips were fabricated in a 018 μm BCD process. Both standard NMOS and SS-ELT NMOS with different sizes were tested under irradiated environment and non-irradiated environment. The tested results showed that the percentage error of equivalent aspect ratio W/L model of the SS-ELT NMOS could be as low as 5%. Under the condition of 10 kGy TID, the off-state leakage current of the SS-ELT NMOS could still be maintained at a very low level, which reflected its great TID tolerance.

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    JIANG Pengkai, LUO Ping, WU Yucao, LING Rongxun. Modeling and Verification of a Symmetrical Square Enclosed Layout Transistor NMOS Device[J]. Microelectronics, 2021, 51(4): 598

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    Paper Information

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    Received: Nov. 9, 2020

    Accepted: --

    Published Online: Feb. 21, 2022

    The Author Email:

    DOI:10.13911/j.cnki.1004-3365.200520

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