Fig. 1. Design results of flat-topped DOE. (a) Phase diagram of DOE; (b) profile of output spot; (c) 3D diagram of spot; (d) horizontal and diagonal sections of spot

Fig. 2. Mode decomposition methods for GSM beam. GSM beams obtained by superposition of (a) coherent modes and (b) random modes; calculated focal spot center section of beams with same beam waist w0 and different M² factors by superposition of (c) coherent modes and (d) random modes

Fig. 3. Output spot morphology of GSM beam after DOE by mode decomposition methods. Output spot morphology of GSM beams with different M² factors after DOE calculated by (a)-(d) coherent modes and (e)-(h) random modes; spot sections calculated by (i) coherent modes and (j) random modes

Fig. 4. Output spot morphology of GSM beam after DOE by convolution methods. Coherent part I_C, incoherent convolution core I_PC, and their convolution I_out when (a) M ²=1.5 and (b) M ²=2.5; spot sections of I_C, I_PC, and I_out when (c) M ²=1.5 and (d) M ²=2.5

Fig. 5. Design of partially coherent beam shaping DOE by proximity correction method. (a) Original target; (b) I_C of DOE designed by original target; (c) I_out of original DOE under a GSM beam with M²=2.5; (d) target with proximity correction; (e) I_C of DOE designed by proximity correction method; (f) I_out of correction DOE under a GSM beam with M²=2.5