EUV/SXR multilayer diffractive grating

Opto-Electronic Engineering, Volume. 34, Issue 5, 27(2007)

[in Chinese]¹ and [in Chinese]^1,2

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¹[in Chinese]

²[in Chinese]

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[in Chinese], [in Chinese]. EUV/SXR multilayer diffractive grating[J]. Opto-Electronic Engineering, 2007, 34(5): 27

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Received: Jun. 20, 2006

Accepted: --

Published Online: Nov. 14, 2007

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