Chinese Journal of Lasers, Volume. 51, Issue 13, 1304004(2024)

Optical Surface Defect Stitching Method Based on Sub-Aperture Feature Dataset

Yingru Wang, Hongjun Wang*, Xueliang Zhu, Bingcai Liu, Xin Yue, and Ailing Tian
Author Affiliations
  • Shaanxi Province Key Laboratory of Thin Films Technology and Optical Test, Xi an Technological University, Xi an 710021, Shaanxi , China
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    Figures & Tables(12)
    Sub-aperture feature data cell structure
    Sub-aperture area array of 4×4
    Correspondence of relative positions and offsets between sub-apertures
    Microscopic scattering dark field detection system. (a) Microscopic scattering dark field imaging device; (b) scanning path of sub-aperture
    Matching stitching result images of sub-aperture area. (a) Stitching result images of the direct stitching method; (b) stitching result images of proposed method
    Stitching result images of full aperture. (a) Full aperture stitching image based on template matching method; (b) full aperture stitching image based on feature dataset
    Defect distribution image corresponding to full aperture image based on feature dataset stitching
    Defect detection results of full aperture image. (a) Detection result of full aperture image based on template matching method; (b) detection result of full aperture image of proposed method
    • Table 1. Data information contained in the sub-aperture feature dataset

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      Table 1. Data information contained in the sub-aperture feature dataset

      Serial numberSub-aperture numberScanning stepsNumber of defectsSparse matrix compression dataOverlapping area data
      11[0, 0]101×1 cell1×7 cell
      22[1, 0]71×1 cell1×7 cell
      33[2, 0]91×1 cell1×7 cell
      44[3, 0]71×1 cell1×7 cell
      55[3, 1]71×1 cell1×7 cell
      66[2, 1]51×1 cell1×7 cell
      77[1, 1]71×1 cell1×7 cell
      88[0, 1]71×1 cell1×7 cell
      99[0, 2]21×1 cell1×7 cell
      1010[1, 2]41×1 cell1×7 cell
      1111[2, 2]21×1 cell1×7 cell
      1212[3, 2]31×1 cell1×7 cell
      1313[3, 3]61×1 cell1×7 cell
      1414[2, 3]61×1 cell1×7 cell
      1515[1, 3]21×1 cell1×7 cell
      1616[0, 3]51×1 cell1×7 cell
    • Table 2. Data contained in the sub-aperture 10 overlapping area data cell

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      Table 2. Data contained in the sub-aperture 10 overlapping area data cell

      Overlapping area numberNumber of defectsType of defectDefect center of massHu invariant momentSparse matrix compression dataRelative position
      10_s2[0; 0]2×1 cell2×1 cell1×1 cell2×1 cell
      10_x0
      10_y0
      10_z1[0]1×1 cell1×1 cell1×1 cell1×1 cell
    • Table 3. Calculated offsets between overlapping areas of matched sub-apertures

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      Table 3. Calculated offsets between overlapping areas of matched sub-apertures

      Serialnumber

      method

      Results of proposed

      Results of the templatematching methodCalculated deviation inX direction /pixelCalculated deviation inY direction /pixel
      Δx /pixelΔy /pixelΔx /pixelΔy /pixel
      1-2.4-3.5-2.7-4.10.30.6
      2-2.3-4.6-2.5-4.50.2-0.1
      30.6-5.30.5-4.50.1-0.8
      45.24.34.93.90.30.4
      55.37.84.57.50.80.3
      64.73.24.52.50.20.7
      75.05.64.94.90.10.7
      84.93.64.53.50.40.1
      95.66.75.16.50.50.2
    • Table 4. Detection results of scratch defects

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      Table 4. Detection results of scratch defects

      Defect numberDetection results of proposed methodDetection results of template matching methodCalculation deviation of length /mm
      Length /mmArea /mm2Length /mmArea /mm2
      257.57460.45437.57040.45400.0042
      316.32130.40816.32620.4083-0.0049
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    Yingru Wang, Hongjun Wang, Xueliang Zhu, Bingcai Liu, Xin Yue, Ailing Tian. Optical Surface Defect Stitching Method Based on Sub-Aperture Feature Dataset[J]. Chinese Journal of Lasers, 2024, 51(13): 1304004

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    Paper Information

    Category: Measurement and metrology

    Received: Aug. 30, 2023

    Accepted: Oct. 9, 2023

    Published Online: May. 16, 2024

    The Author Email: Hongjun Wang (whj0253@sina.com)

    DOI:10.3788/CJL231154

    CSTR:32183.14.CJL231154

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