Chinese Journal of Lasers, Volume. 51, Issue 13, 1304004(2024)
Optical Surface Defect Stitching Method Based on Sub-Aperture Feature Dataset
Fig. 4. Microscopic scattering dark field detection system. (a) Microscopic scattering dark field imaging device; (b) scanning path of sub-aperture
Fig. 5. Matching stitching result images of sub-aperture area. (a) Stitching result images of the direct stitching method; (b) stitching result images of proposed method
Fig. 6. Stitching result images of full aperture. (a) Full aperture stitching image based on template matching method; (b) full aperture stitching image based on feature dataset
Fig. 7. Defect distribution image corresponding to full aperture image based on feature dataset stitching
Fig. 8. Defect detection results of full aperture image. (a) Detection result of full aperture image based on template matching method; (b) detection result of full aperture image of proposed method
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Yingru Wang, Hongjun Wang, Xueliang Zhu, Bingcai Liu, Xin Yue, Ailing Tian. Optical Surface Defect Stitching Method Based on Sub-Aperture Feature Dataset[J]. Chinese Journal of Lasers, 2024, 51(13): 1304004
Category: Measurement and metrology
Received: Aug. 30, 2023
Accepted: Oct. 9, 2023
Published Online: May. 16, 2024
The Author Email: Hongjun Wang (whj0253@sina.com)
CSTR:32183.14.CJL231154