Fig. 1. Schematic diagram of the experimental setup. M, mirror; ND, neutral density attenuator.

Fig. 2. (a) Morphology of the microchannel measured by the LCM; (b) cross-section profile.

Fig. 3. Relationship between the morphology and the laser power.

Fig. 4. Trend of width, depth, and roughness of microchannels varies with the temperature.

Fig. 5. SEM images of 15 mW heating at different temperatures and at an incubation time for 1 h. (a) Room temperature; (b) 400°C; (c) 800°C; the upper right corner is the selected area, and the lower right corner is the counting result.

Fig. 6. Relationship between the change rate of the morphology and the incubation time when the work piece is heated to 800°C.