Experiment Science and Technology, Volume. 22, Issue 2, 41(2024)

Comprehension Experimental Design for Preparation and Optical Band Gap Control of Ultrathin Amorphous Oxide Semiconductor Films

Lei XU*, Xinnan ZHANG, Ruyu LIANG, Mengzhen HU, Zengcai SONG, and Shijun LUO
Author Affiliations
  • School of Electronic Engineering, North China University of Water Resources and Electric Power, Zhengzhou 450046, China
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    References(10)

    [6] KIM H, HORWITZ J, KUSHTO G et al. Effect of film thickness on the properties of indium tin oxide thin films[J]. Journal of Applied Physics, 88, 6021-6025(2000).

    [13] YANG H, ZHANG Y Q, MATSUO Y et al. Thermopower modulation analyses of high-mobility transparent amorphous oxide semiconductor thin-film transistors[J]. ACS Applied Electronic Materials, 4, 5081-5086(2022).

    [14] PARK J M, LEE H, LEE G et al. Organic/inorganic hybrid top-gate transistors with ultrahigh electron mobility via enhanced electron pathways[J]. ACS Applied Materials & Interfaces, 15, 1525-1534(2023).

    [16] HE F C, WANG Y F, LIN Z H et al. Aqueous solution-deposited aluminum-gallium-oxide alloy gate dielectrics for low voltage fully oxide thin film transistors[J]. Applied Physics Letters, 119, 112102(2021).

    [18] FENEBERG M, OSTERBURG S, LANGE K et al. Band gap renormalization and Burstein-Moss effect in silicon- and germanium-doped wurtzite GaN up to 1020 cm−3[J]. Physical Review B, 90, 075203(2014).

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    Lei XU, Xinnan ZHANG, Ruyu LIANG, Mengzhen HU, Zengcai SONG, Shijun LUO. Comprehension Experimental Design for Preparation and Optical Band Gap Control of Ultrathin Amorphous Oxide Semiconductor Films[J]. Experiment Science and Technology, 2024, 22(2): 41

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    Paper Information

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    Received: Sep. 19, 2023

    Accepted: --

    Published Online: May. 21, 2024

    The Author Email: Lei XU (xulei@ncwu.edu.cn)

    DOI:10.12179/1672-4550.20230433

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