Chinese Optics Letters, Volume. 8, Issue s1, 59(2010)

Plasma ion-assisted deposition in UV filters

Xiaojun Yin1, Shuaifeng Zhao1, Shuguo Fei1, Peng Gao1, Ruisheng Wang1, Jing Ma2, Shu Song2, and Bangjun Liao2
Author Affiliations
  • 1Shenyang Academy of Instrumentation Science, Shenyang 110043, China
  • 2Shenyang HB Optical Technology Co., Ltd., Shenyang 110043, China
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    Plasma ion-assisted deposition (PIAD) process for ultraviolet (UV)-induced transmission and full dielectric thin-film filters in the 200–400 nm spectral region is described. The design and manufacturing method of the UV filters are introduced. The UV filters exhibit deep blocking (> optical density (OD)5–OD6), high transmittance, and stable environment durability. These UV filters pass 10 cycles in an aggravated temperature-humidity test, according to ISO9022-2 and MIL-STD-810F standards.

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    Xiaojun Yin, Shuaifeng Zhao, Shuguo Fei, Peng Gao, Ruisheng Wang, Jing Ma, Shu Song, Bangjun Liao, "Plasma ion-assisted deposition in UV filters," Chin. Opt. Lett. 8, 59 (2010)

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    Paper Information

    Category: 3d holographic display

    Received: Dec. 4, 2009

    Accepted: --

    Published Online: May. 14, 2010

    The Author Email:

    DOI:10.3788/COL201008s1.0059

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