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Acta Optica Sinica, Volume. 22, Issue 3, 344(2002)

Finite Element Analysis of Tunable Optical Filter Array Based on Microstructure Technique

Chen Min1,2、*, Liu Xu1,2, and Li Haifeng1,2
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    [1] [1] Moore D F, Syms R R. Recent developments in micromachined silicon. Electron. and Commun. Engng. J., 1999, :261～270

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    Chen Min, Liu Xu, Li Haifeng. Finite Element Analysis of Tunable Optical Filter Array Based on Microstructure Technique[J]. Acta Optica Sinica, 2002, 22(3): 344

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    Paper Information

    Category: Optical Devices

    Received: Jan. 12, 2001

    Accepted: --

    Published Online: Aug. 12, 2020

    The Author Email: Min Chen (cmzju@163.com)

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology