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Piezoelectrics & Acoustooptics, Volume. 46, Issue 6, 934(2024)

Optimized Design of a Large Stroke-High Frequency Piezoelectric Driven Nanopositioning Platform

ZHANG Meng, LIU Shicheng, ZHANG Songlin, ZHU Yuqing, and WU Yao
Author Affiliations
  • College of Mechanical and Electrical Engineering, Shaanxi University of Science & Technology, Xi’an 710021, China
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    ZHANG Meng, LIU Shicheng, ZHANG Songlin, ZHU Yuqing, WU Yao. Optimized Design of a Large Stroke-High Frequency Piezoelectric Driven Nanopositioning Platform[J]. Piezoelectrics & Acoustooptics, 2024, 46(6): 934

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    Received: Jul. 17, 2024

    Accepted: Feb. 13, 2025

    Published Online: Feb. 13, 2025

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2024.06.016

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology