Optics and Precision Engineering, Volume. 33, Issue 9, 1434(2025)

Rapid and high-precision detection on surface defects of Micro LED

Tianyuan ZHAO1,2, Dengfeng DONG1,2、*, Guoming WANG1,2, Bo WANG1, and Weihu ZHOU1,2
Author Affiliations
  • 1Institute of Microelectronics, Chinese Academy of Sciences, Beijing00029, China
  • 2University of Chinese Academy of Sciences, Beijing100049, China
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    Figures & Tables(13)
    Structure of LED-YOLO network model
    Structure of LDFM
    Dynamic convolution
    Structure of enhanced coordinate attention module
    Micro LED defect collection system
    Enlarged images of defects and normal image of Micro LED
    Comparison of detection results of different models
    Comparison of heatmap of different methods
    • Table 1. Defect categories and quantities in Micro LED dataset

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      Table 1. Defect categories and quantities in Micro LED dataset

      CategoryNormal

      Foreign-

      matter

      Metal-

      leak

      Edge-

      defect

      Coating-

      broken

      Train69 3505 8303 7711 9414 505
      Val10 045916504401467
      Test21 7171 736662468609
      Total101 1128 4824 9372 8105 581
    • Table 2. Experiment results of LED-YOLO

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      Table 2. Experiment results of LED-YOLO

      CategoryPRmAP
      Normal99.199.599.4
      Foreign-matter97.990.198.0
      Metal-leak98.897.499.4
      Edge-defect97.798.699.5
      Coating-broken99.099.299.5
      All98.596.999.2
    • Table 3. Experimental results of different models

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      Table 3. Experimental results of different models

      ModelP(%)R(%)mAP(%)F1(%)Params(M)FPS
      SSD85.686.887.486.2024.759
      RFB-SSD89.190.388.989.7025.445
      RetinaNet91.487.989.189.6236.541
      Retina U-Net91.689.990.790.7438.033
      YOLOv5s96.497.197.496.759.1117
      YOLOv6s96.583.386.689.4216.0158
      YOLOv8s95.796.997.596.3011.178
      YOLOv8s-p296.297.296.696.7010.6163
      YOLOv9s96.096.097.196.007.2121
      YOLOv10s97.893.097.695.348.1256
      YOLOv11s97.592.897.395.099.4200
      LED-YOLO(Ours)98.596.999.297.697.8212
    • Table 4. Experimental results of different loss functions

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      Table 4. Experimental results of different loss functions

      MethodmAP(%)F1(%)FPS
      Our work+DIoU98.892.67222
      Our work+GIoU96.491.52185
      Our work+EIoU9794.57217
      Our work+SIoU98.795.15212
      Our work+WIoU98.595.60144
      Our work+DIoU_W99.297.69212
    • Table 5. Ablation experiments of three improvement approaches

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      Table 5. Ablation experiments of three improvement approaches

      LDFMECAMDIoU_WmAP/%F1/%Params/MFPS
      97.395.099.4200
      98.296.958.3200
      98.697.249.0217
      97.795.059.4217
      98.797.497.8222
      98.596.098.3212
      98.297.049.0222
      99.297.697.8212
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    Tianyuan ZHAO, Dengfeng DONG, Guoming WANG, Bo WANG, Weihu ZHOU. Rapid and high-precision detection on surface defects of Micro LED[J]. Optics and Precision Engineering, 2025, 33(9): 1434

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    Paper Information

    Category:

    Received: Dec. 17, 2024

    Accepted: --

    Published Online: Jul. 22, 2025

    The Author Email: Dengfeng DONG (dongdengfeng@ime.ac.cn)

    DOI:10.37188/OPE.20253309.1434

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