Acta Optica Sinica, Volume. 31, Issue 8, 805001(2011)
Moiré Fringe-Based Focusing-Test Scheme for Optical Projection Lithography
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Yan Wei, Li Yanli, Chen Mingyong, Wang Jian. Moiré Fringe-Based Focusing-Test Scheme for Optical Projection Lithography[J]. Acta Optica Sinica, 2011, 31(8): 805001
Paper Information
Category: Diffraction and Gratings
Received: Mar. 9, 2011
Accepted: --
Published Online: Jul. 29, 2011
The Author Email: Wei Yan (yanwei@ioe.ac.cn)
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