Piezoelectrics & Acoustooptics, Volume. 47, Issue 2, 203(2025)

Tunable Surface Acoustic Wave Resonators Based on Vanadium Dioxide

GONG Ao1, HE Wei1,2, GUO Yilong1, BAI Yan1, HUANG Qiuqin2, and HUANG Wen1,3
Author Affiliations
  • 1School of Microelectronics, Hefei University of Technology, Hefei 230601, China
  • 2Shenzhen Academy of Information and Communication Technology, Shenzhen 518048, China
  • 3Yiwu Research Institute, Fudan University, Yiwu 322000, China
  • show less
    References(16)

    [1] [1] CHEN Ruixuan, ZHANG Qingyuan, ZHOU Lingyun, et al. Reconfigurable dual-band bandpass-to-bandstop filter using SAW resonators and lumped elements[C]//Nanjing, China: 2021 IEEE MTT-S International Wireless Symposium (IWS), 2021: 1-3.

    [2] [2] KONNO A, HIRANO H, INABA M, et al. Tunable surface acoustic wave filter using integrated micro-electro-mechanical-system based varactors made of electroplated gold[J]. Japanese Journal of Applied Physics, 2013, 52(7S): 07HD13.

    [3] [3] HASHIMOTO K Y, KIMURA T, MATSUMURA T, et al. Moving tunable filters forward: a “Heterointegration”research project for tunable filters combining MEMS and RF SAW/BAW technologies[J]. IEEE Microwave Magazine, 2015, 16(7): 89-97.

    [4] [4] KOMATSU T, HASHIMOTO K Y, OMORI T, et al. Tunable radio-frequency filters using acoustic wave resonators and variable capacitors[J]. Japanese Journal of Applied Physics, 2010, 49(7S): 07HD24.

    [5] [5] FOULADI AZARNAMINY A, MANSOUR R R. Reconfigurable SAW resonators and tunable filters using monolithically integrated VO₂ switches[J]. IEEE Transactions on Microwave Theory Techniques, 2023, 71(1): 181-192.

    [6] [6] AZARNAMINY A F, SULEIMAN A O, CHAKER M, et al. A reconfigurable SAW resonator using monolithically integrated switches[C]//Denver, CO, USA: 2022 IEEE/MTT-S International Microwave Symposium-IMS 2022, 2022: 806-808.

    [7] [7] AZARNAMINY A F, JIANG Junwen, MANSOUR R R. Switched dual-band SAW filter using vanadium oxide switches[C]//Atlanta, GA, USA: 2021 IEEE MTT-S International Microwave Symposium (IMS), 2021: 677-680.

    [8] [8] AZARNAMINY A F, MANSOUR R R. Switched dual-band SAW filters using hybrid and monolithically integrated vanadium oxide switches[J]. IEEE Transactions on Microwave Theory and Techniques, 2021, 70(1): 876-885.

    [10] [10] MORIN F J. Oxides which show a metal-to-insulator transition at the neel temperature[J]. Physical Review Letters, 1959, 3(1): 34-36.

    [11] [11] TAKAMINE Y, TAKAI T, IWAMOTO H, et al. A novel 3.5 GHz low-loss bandpass filter using I.H.P.SAW resonators[C]//Kyoto, Japan: 2018 Asia-Pacific Microwave Conference (APMC), 2018: 1342-1344.

    [12] [12] BUTAUD E, TAVEL B, BALLANDRAS S, et al. Smart Cut™ Piezo On Insulator (POI) substrates for high performances SAW components[C]//Las Vegas, NV, USA: 2020 IEEE International Ultrasonics Symposium (IUS), 2020: 1-4.

    [13] [13] TAKAI T, IWAMOTO H, TAKAMINE Y, et al. High-performance SAW resonator on new multilayered substrate using LiTaO3 crystal[J]. IEEE Trans Ultrason Ferroelectr Freq Control, 2017, 64(9): 1382-1389.

    [14] [14] FULS E N, HENSLER D H, ROSS A R. Reactively sputtered vanadium dioxide thin films[J]. Applied Physics Letters, 1967, 10(7): 199-201.

    [15] [15] JIANG Meng, CAO Xun, BAO Shanhu, et al. Regulation of the phase transition temperature of VO2 thin films deposited by reactive magnetron sputtering without doping[J]. Thin Solid Films, 2014, 562: 314-318.

    [16] [16] YU Qian, LI Wenwu, LIANG Jiran, et al. Oxygen pressure manipulations on the metal–insulator transition characteristics of highly (0 1 1)-oriented vanadium dioxide films grown by magnetron sputtering[J]. Journal of Physics D: Applied Physics, 2013, 46(5): 055310.

    [17] [17] VU T D, CHEN Zhang, ZENG Xianting, et al. Physical vapour deposition of vanadium dioxide for thermochromic smart window applications[J]. Journal of Materials Chemistry C, 2019, 7(8): 2121-2145.

    Tools

    Get Citation

    Copy Citation Text

    GONG Ao, HE Wei, GUO Yilong, BAI Yan, HUANG Qiuqin, HUANG Wen. Tunable Surface Acoustic Wave Resonators Based on Vanadium Dioxide[J]. Piezoelectrics & Acoustooptics, 2025, 47(2): 203

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Received: Nov. 14, 2024

    Accepted: Jun. 17, 2025

    Published Online: Jun. 17, 2025

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2025.02.001

    Topics