Piezoelectrics & Acoustooptics, Volume. 47, Issue 2, 203(2025)

Tunable Surface Acoustic Wave Resonators Based on Vanadium Dioxide

GONG Ao1, HE Wei1,2, GUO Yilong1, BAI Yan1, HUANG Qiuqin2, and HUANG Wen1,3
Author Affiliations
  • 1School of Microelectronics, Hefei University of Technology, Hefei 230601, China
  • 2Shenzhen Academy of Information and Communication Technology, Shenzhen 518048, China
  • 3Yiwu Research Institute, Fudan University, Yiwu 322000, China
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    A novel reconfigurable surface acoustic wave (SAW) resonator has been designed through simulation. The design integrates vanadium dioxide(VO2), a phase-change material, with the resonator on a single chip to achieve a compact reconfigurable resonator. By utilizing the phase-change properties of VO2, portions of the SAW resonator’s electrodes are replaced with VO2. The operating state of these VO2 electrodes is thermally controlled, enabling frequency tuning between two different states. With an electrode width of 1.15 μm (corresponding to a theoretical wavelength λ of 4.6 μm), simulation results demonstrate that the reconfigurable resonator’s frequency can be tuned to 472 MHz and 774 MHz, exhibiting electromechanical coupling coefficients of 7.1% and 5.6%, respectively, and the tuning range of the resonator peaks at 302 MHz. Parametric simulations of electrode thickness reveal that the SAW resonator attains its highest electromechanical coupling coefficient at 0.12λ, which facilitates broader bandwidth for subsequent reconfigurable SAW filters. Additionally, we propose a fabrication process for VO2-based reconfigurable SAW resonators, offering practical design guidance.

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    GONG Ao, HE Wei, GUO Yilong, BAI Yan, HUANG Qiuqin, HUANG Wen. Tunable Surface Acoustic Wave Resonators Based on Vanadium Dioxide[J]. Piezoelectrics & Acoustooptics, 2025, 47(2): 203

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    Paper Information

    Received: Nov. 14, 2024

    Accepted: Jun. 17, 2025

    Published Online: Jun. 17, 2025

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2025.02.001

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