Acta Optica Sinica, Volume. 31, Issue 10, 1031001(2011)
Optical Properties of Ta2O5 Thin Films Fabricated by Atomic Layer Deposition
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Fan Huanhuan, Zhang Yueguang, Shen Weidong, Li Yanghui, Li Chengshuai, He Junpeng, Liu Chunliang, Liu Xu. Optical Properties of Ta2O5 Thin Films Fabricated by Atomic Layer Deposition[J]. Acta Optica Sinica, 2011, 31(10): 1031001
Paper Information
Category: Thin Films
Received: Mar. 22, 2011
Accepted: --
Published Online: Sep. 5, 2011
The Author Email: Huanhuan Fan (fanhuanhuan@zju.edu.cn)
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