Infrared and Laser Engineering, Volume. 46, Issue 11, 1118003(2017)

Application of aspheric technique in immersion lithography lighting system

Li Meixuan1,2、*, Wang Li1, Dong Lianhe1, and Zhao Ying2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    References(12)

    [1] [1] Hu Dejin. Precision grinding and adaptive control method for hard and brittle aspheric optical mirror[J]. Acta Optica Sinica, 2016, 36(7): 0722004. (in Chinese)

    [2] [2] Pang Zhihai, Fan Xuewu, Ma Zhen, et al. Free-form optical elements corrected aberrations of optical system[J]. Acta Optica Sinica, 2016, 36(5): 0522001. (in Chinese)

    [5] [5] Fan Zengming, Li Zhou, Qian Lixun. Aspherical lens laser beam shaping system[J]. Infrared and Laser Engineering, 2012, 41(2): 353-357. (in Chinese)

    [6] [6] Wang Honghao, Ming Ming, Lv Tianyu, et al. Testing methods of high-gradient conformal aspheric surfaces based on annular sub-aperture stitching[J]. Infrared and Laser Engineering, 2016, 45(4): 0417001. (in Chinese)

    [7] [7] Bai Yu, Liao Zhiyuan, Liao Sheng, et al. Infrared dual band athermal optical system with common aperture[J]. Opt Precision Eng, 2016, 24(2): 268-277. (in Chinese)

    [8] [8] Bai Yu, Liao Zhiyuan, Li Hua, et al. Design and analyse on catadioptric MWIR athermal imaging system[J]. Infrared and Laser Engineering, 2015, 44(2): 407-412. (in Chinese)

    [9] [9] Forbes G W. Robust, efficient computational methods for axially symmetric optical aspheres[J]. Opt Express, 2010, 18(19): 19700-19712.

    [10] [10] Zhang L, Liu D, Shi T, et al. Practical and accurate method for aspheric misalignment aberrations calibration in non-nullinterferometric testing[J]. Applied Opitcs, 2013, 52(35): 8501-8511.

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    CLP Journals

    [1] Yao Hu, Xin Tao, Qun Hao. Virtual-real combination interferometry for aspheric surface parameter error measurement with cat-eye-wavefront positioning (invited)[J]. Infrared and Laser Engineering, 2022, 51(9): 20220497

    [2] Chenyang Lv, Renjun Zhan, Ying Cui. Collimating lens design and aspheric optimization method of laser cauterization gun[J]. Infrared and Laser Engineering, 2021, 50(3): 20200219

    [3] Ling Li, Jiafu Zhang, Xin Tao, Zongwei Yu, Mengxu Li, Renyuan Wang, Xi Chen, Chengguang Cui, Xiangdong Wang. Automated interferometry test of high-cleanliness ultra-smooth aspherical surfaces[J]. Infrared and Laser Engineering, 2024, 53(5): 20240059

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    Li Meixuan, Wang Li, Dong Lianhe, Zhao Ying. Application of aspheric technique in immersion lithography lighting system[J]. Infrared and Laser Engineering, 2017, 46(11): 1118003

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    Paper Information

    Category: 光学设计及仿真

    Received: Mar. 5, 2017

    Accepted: Apr. 3, 2017

    Published Online: Dec. 26, 2017

    The Author Email: Meixuan Li (limeixuannuc@163.com)

    DOI:10.3788/irla201746.1118003

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