On-chip chalcogenide microresonators with low-threshold parametric oscillation

Bin Zhang; Pingyang Zeng; Zelin Yang; Di Xia; Jiaxin Zhao; Yaodong Sun; Yufei Huang; Jingcui Song; Jingshun Pan; Huanjie Cheng; Dukyong Choi; Zhaohui Li

doi:10.1364/PRJ.422435

Photonics Research, Volume. 9, Issue 7, 1272(2021)

On-chip chalcogenide microresonators with low-threshold parametric oscillation

Bin Zhang1...4,†,*, Pingyang Zeng1,†, Zelin Yang1,†, Di Xia1,†, Jiaxin Zhao1, Yaodong Sun1, Yufei Huang1, Jingcui Song1, Jingshun Pan1, Huanjie Cheng1, Dukyong Choi2, and Zhaohui Li1,35,* |Show fewer author(s)

Author Affiliations

¹Key Laboratory of Optoelectronic Materials and Technologies, School of Electrical and Information Technology, Sun Yat-sen University, Guangzhou 510275, China

²Laser Physics Centre, Research School of Physics, Australian National University, Canberra, ACT 2601, Australia

³Southern Marine Science and Engineering Guangdong Laboratory (Zhuhai), Zhuhai 519000, China

⁴e-mail: zhangbin5@mail.sysu.edu.cn

⁵e-mail: lzhh88@mail.sysu.edu.cn

show less

Figures & Tables(10)

Fig. 1. (a) Schematic of the improved As2S3 film by an in situ light-induced annealing process. The molecular structures of the As2S3 (b) before and (c) after annealing. The optical microscope images in dark field mode of As2S3 film: (d) oxidated before annealing; (e) maintained stability after the annealing process in the air.

Download full size

View in Article

Fig. 2. (a) Composition of As2S3 bulk glass, FILM-D, FILM-L, and T180. (b) RI of FILM-D, FILM-L, T130, T150, and T180 as well as the As2S3 bulk glass. (c) Raman spectra of FIML-D, FILM-L, the glass, and films T130, T150, and T180. (Note: FILM-L annealed at the power densities of 200 mW/cm2.) SEM of the waveguide after the electron-beam resist development step with different films: (d) FILM-T; (e) FILM-L.

Download full size

View in Article

Fig. 3. Raman Spectra of As2S3 films by light annealing under power densities of (a) 10 mW/cm2, (b) 100 mW/cm2, and (c) 200 mW/cm2. (d) Changes of the S8 bonds at 219 cm−1 in As2S3 films under different power densities of light in 900 min. (e) RIs of As2S3 films by light annealing under different power densities of light after 900 min and FILM-D, FILM-T180 as well as the bulk glass.

Download full size

View in Article

Fig. 4. 3D AFM scan images of the surface of ChG films: by light annealing under power densities of (a) 10 mW/cm2 and (b) 200 mW/cm2; (c) by thermal annealing at the temperature of 180°C. (d) Film as deposited.

Download full size

View in Article

Fig. 5. (a) Fabrication process for As2S3/BCB waveguides. SEM images of (b) cross-sectional and (c) top view of the As2S3 spiral waveguide. (d) Measured propagation losses of ChG waveguides (lines a–c correspond to waveguides with and without the resist as well as with BCB by thermal reflow, respectively). (e) BCB-cladding waveguides at different thermal reflow temperatures (lines a–d correspond to waveguides reflowed at 180°C, 160°C, 120°C, and 140°C, respectively).

Download full size

View in Article

Fig. 6. (a) Simulated dispersion of As2S3 microring resonator for quasi-TE and TM modes. Insets are calculated TE and TM mode profiles around 1550 nm, respectively. (b) Transmission spectrum of the resonator in the range 1510–1630 nm (TM00). (c) Histogram of intrinsic loss from the measurement of the ChG MR (TM00). (d) One typical resonance with a linewidth of 238 MHz (TM00). SEM images of the top view of (e) microring and (f) enlarged microring section.

Download full size

View in Article

Fig. 7. (a) Schematic of the OPO measurement setup. (b) Measured OPO spectrum for input power of 7 mW (TM00). (c) Output power of the first-generated OPO sideband as a function of input power.

Download full size

View in Article

Table 1. Assignments of Raman Shifts Corresponding to the Chemical Bonds in As2S3 Films

View table

View in Article

Table 1. Assignments of Raman Shifts Corresponding to the Chemical Bonds in As2S3 Films

Raman Shift ( ${cm}^{- 1}$ )	Assignment
135	Homopolar bonds
165	Homopolar bonds
189	S-S homopolar bonds
219	$S_{8}$ ring
234	As-As homopolar bonds in ${As}_{4} S_{4}$ unit
310	${As}_{4} S_{4}$ unit
345	As-S vibration in ${AsS}_{3}$ pyramids
356	${As}_{4} S_{4}$ unit
380	Interaction of the ${AsS}_{3}$ unit

Table 2. Summary of the RIE and ICP-RIE Conditions^a
View table
View in Article
Table 2. Summary of the RIE and ICP-RIE Conditions^a
RIE ICP
Chemistry ${CHF}_{3} : Ar$ $Ar : {CF}_{4} : O_{2}$
Pressure (mTorr) 10 10
RF power (W) 100 10
ICP power (W) 300

Table 3. Comparison of the Loss/Q-Factors in ChG Waveguides/Microrings On-Chip

View table

View in Article

Table 3. Comparison of the Loss/Q-Factors in ChG Waveguides/Microrings On-Chip

Ref.	Material	$n$	$n_{2}$ ( $m^{2} / W$ )	TPA Coefficient ( ${mW}^{- 1}$ )	Geometry	Dimensions ( ${μm}^{2}$ )	$γ$ ( $m^{- 1} \cdot W^{- 1}$ )	$α$ (dB/cm)	${FOM}_{α}$ [ $γ / α$ ] ( $W^{- 1}$ )	${FOM}_{TPA}$	DE^b at 1550 nm
[36]	${As}_{2} S_{3}$	2.37	$2.9 \times 10^{- 18}$	$6.2 \times 10^{- 15}$	Waveguide	$4 \times 2.6$	1.7	0.05	1.48	$> 300$	N
[37]	${As}_{2} S_{3}$	2.37	$3 \times 10^{- 18}$	$6.2 \times 10^{- 15}$	Waveguide	$2 \times 0.85$ (0.35 deep)	$\sim 10$ ^a	0.8	0.54	$> 300$	Y
[12]	${As}_{2} S_{3}$	2.43	$3 \times 10^{- 18}$	$6.2 \times 10^{- 15}$	Microring	$10 \times 1.3$ (30° slope angle)	/	$1.44 \times 10^{7} / 0.028$	/	$> 300$	N
[38]	${Ge}_{11.5} {As}_{24} {Se}_{64.5}$	2.66	$8.6 \times 10^{- 18}$	$10^{- 13}$	Waveguide	$0.63 \times 0.5$	136	2.6	2.27	60	Y
[26]	${Ge}_{23} {Sb}_{7} S_{70}$	2.15	$0.93 \times 10^{- 18}$ ^a	$10^{- 13}$	Waveguide/Microring	$0.8 \times 0.45$	10.47^a	0.5 (waveguide) $7.5 \times 10^{5}$ (ring)	0.91	6	N
[39]	${Ge}_{22} {Sb}_{18} {Se}_{60}$	2.74	$5.1 \times 10^{- 18}$	$4 \times 10^{- 13}$	Waveguide	$0.95 \times 0.4$	58	4	0.48	8.3	Y
This work	$A s_{2} S_{3}$	2.43	$3 \times 1 0^{- 18}$	$6.2 \times 1 0^{- 15}$	Waveguide/Microring	$2 \times 0 .8 5$	10	$0.1 (waveguide) / 1 .3 3 \times 1 0^{6} (r ing)$	4.34/2.41	$> 300$	Y

Tools

Get Citation

Copy Citation Text

Bin Zhang, Pingyang Zeng, Zelin Yang, Di Xia, Jiaxin Zhao, Yaodong Sun, Yufei Huang, Jingcui Song, Jingshun Pan, Huanjie Cheng, Dukyong Choi, Zhaohui Li, "On-chip chalcogenide microresonators with low-threshold parametric oscillation," Photonics Res. 9, 1272 (2021)

Download Citation

EndNote(RIS)BibTex Plain Text

Set citation alerts for article

Save article for my favorites