Fig. 1. Basic principle diagram of optical quality detection system

Fig. 2. Optical structure diagram of shaping beam extension collimating lens

Fig. 3. Energy distribution of incoming and outgoing light of shaping beam expansion collimating lens. (a) Input light energy distribution diagram; (b) output light energy distribution diagram

Fig. 4. Optical system of four-quadrant detector lens

Fig. 5. Spot footprint diagram

Fig. 6. Initial structure diagram^[17]. (a) Initial structure diagram of tube lens; (b) initial structure diagram of infinity microscopic objective lens

Fig. 7. Optical structure diagram of microscope objective

Fig. 8. MTF curves of microscope lens

Fig. 9. Image quality evaluation of microscopic objective optical system. (a) Distortion; (b) relative illumination

Fig. 10. Lightpath structure of four-quadrant detector lens optical quality inspection device at different rotation angles. (a) 0°; (b) 8°; (c) 12°

Fig. 11. Spot energy diagram of module after rotating at different angles. (a) 0°; (b) 8°; (c) 12°