Fig. 1. Working principle of Michelson interferometer

Fig. 2. Corner reflector flexible support structure schematic diagram

Fig. 3. Deformation model of cantilever beam

Fig. 4. Schematic diagram of guide spring deformation

Fig. 5. Decomposition diagram of guide spring deformation

Fig. 6. Flexible support structure model

Fig. 7. The relationship between the width of the flexible reed and the coupling displacement and stroke

Fig. 8. Physical picture of flexible support structure

Fig. 9. Simulation analysis of a flexible support structure

Fig. 10. Schematic diagram of flexible support structure test

Fig. 11. Test results of flexible support structure