Chinese Journal of Lasers, Volume. 39, Issue s1, 107002(2012)
Effect of Glass Substrate and Surface Roughness on Ellipsometric Measurement of Silicon Nitride Films
Figures & Tables(0)
Tools
Get Citation
Copy Citation Text
Liu Wende, Chen Chi, Zhang Hang, Guo Wei, Yu Jing, Fan Qiming, Xu Yingying. Effect of Glass Substrate and Surface Roughness on Ellipsometric Measurement of Silicon Nitride Films[J]. Chinese Journal of Lasers, 2012, 39(s1): 107002
Paper Information
Category: materials and thin films
Received: Jul. 16, 2011
Accepted: --
Published Online: May. 28, 2012
The Author Email: Wende Liu (wendeliu@nim.ac.cn)
© Copyright 2018-2021 | Chinese Laser Press.
All Rights Reserved 沪ICP备15018463号-20