Chinese Journal of Lasers, Volume. 46, Issue 10, 1002013(2019)

Femtosecond Laser Direct Writing of Copper Microelectrodes

Jianing Liao, Xinda Wang, Xingwen Zhou, Lihang Li, wei Guo, and Peng Peng*
Author Affiliations
  • School of Mechanical Engineering & Automation, Beihang University, Beijing 100191, China
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    Figures & Tables(5)
    Manufacting of copper microelectrodes. (a) Diagram of coating preparation and laser scanning; (b) digital photo of copper ion coating surface topography; (c) schematic of laser direct writing system; (d) digital photo of copper electrode after cleaning
    Copper electrode wire width and sheet resistance versus incident laser power. (a) Wire width; (b) sheet resistance
    Copper electrode sheet resistance versus scanning speed
    XRD patterns of copper electrodes prepared under different laser powers
    SEM images of copper electrodes obtained under different laser powers (illustrations are high-resolution SEM images). (a) 456 mW; (b) 640 mW; (c) 880 mW; (d) 1580 mW
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    Jianing Liao, Xinda Wang, Xingwen Zhou, Lihang Li, wei Guo, Peng Peng. Femtosecond Laser Direct Writing of Copper Microelectrodes[J]. Chinese Journal of Lasers, 2019, 46(10): 1002013

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    Paper Information

    Category: laser manufacturing

    Received: Apr. 23, 2019

    Accepted: Jun. 17, 2019

    Published Online: Oct. 25, 2019

    The Author Email: Peng Peng (ppeng@buaa.edu.cn)

    DOI:10.3788/CJL201946.1002013

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