Chinese Journal of Lasers, Volume. 46, Issue 10, 1002013(2019)
Femtosecond Laser Direct Writing of Copper Microelectrodes
Fig. 1. Manufacting of copper microelectrodes. (a) Diagram of coating preparation and laser scanning; (b) digital photo of copper ion coating surface topography; (c) schematic of laser direct writing system; (d) digital photo of copper electrode after cleaning
Fig. 2. Copper electrode wire width and sheet resistance versus incident laser power. (a) Wire width; (b) sheet resistance
Fig. 5. SEM images of copper electrodes obtained under different laser powers (illustrations are high-resolution SEM images). (a) 456 mW; (b) 640 mW; (c) 880 mW; (d) 1580 mW
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Jianing Liao, Xinda Wang, Xingwen Zhou, Lihang Li, wei Guo, Peng Peng. Femtosecond Laser Direct Writing of Copper Microelectrodes[J]. Chinese Journal of Lasers, 2019, 46(10): 1002013
Category: laser manufacturing
Received: Apr. 23, 2019
Accepted: Jun. 17, 2019
Published Online: Oct. 25, 2019
The Author Email: Peng Peng (ppeng@buaa.edu.cn)