Chinese Journal of Lasers, Volume. 46, Issue 10, 1002013(2019)

Femtosecond Laser Direct Writing of Copper Microelectrodes

Jianing Liao, Xinda Wang, Xingwen Zhou, Lihang Li, wei Guo, and Peng Peng*
Author Affiliations
  • School of Mechanical Engineering & Automation, Beihang University, Beijing 100191, China
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    Femtosecond laser direct writing technique is used to fabricate microelectrodes on flexible substrates with a cheap copper ion pre-coating. The copper nanoparticles are obtained using laser-induced reduction and in situ bonding, and the as-written copper electrodes exhibit excellent electrical conductivity. Further, the effects of laser power and scan speed on the microstructure and electrical conductivity of the electrodes are studied. The results denote that the conductivity generally increases with the increase of laser energy density. The obtained copper electrodes are mostly network-like metallic copper and exhibit the lowest sheet resistance of 2.74 Ω·sq -1 at a laser power of 1210 mW and a scan speed of 1 mm/s. This research provides a new technique for developing low-cost and high-efficiency flexible devices, which can benefit the application of copper nanomaterials in the electronics industry.

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    Jianing Liao, Xinda Wang, Xingwen Zhou, Lihang Li, wei Guo, Peng Peng. Femtosecond Laser Direct Writing of Copper Microelectrodes[J]. Chinese Journal of Lasers, 2019, 46(10): 1002013

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    Paper Information

    Category: laser manufacturing

    Received: Apr. 23, 2019

    Accepted: Jun. 17, 2019

    Published Online: Oct. 25, 2019

    The Author Email: Peng Peng (ppeng@buaa.edu.cn)

    DOI:10.3788/CJL201946.1002013

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