Fig. 1. Schematic of morphology detection and control system

Fig. 2. Three-dimensional measurement mathematical model of profilometer

Fig. 3. Point cloud slicing process. (a) Flow chart of point cloud slice deviation contour extraction and sorting; (b) point cloud binary image generation process

Fig. 4. Compensation path planning process. (a) Original slice contour and deviation contour; (b) compensation path planning

Fig. 5. Three-dimensional model and photo of sample. (a) Three-dimensional model; (b) photo

Fig. 6. Point cloud of original morphology

Fig. 7. Three-dimensional point cloud after pretreatment

Fig. 8. Calculation of flatness error

Fig. 9. Point cloud of deviated region

Fig. 10. Deviation point cloud process. (a) Slice point cloud rasterization; (b) point cloud binarization; (c) slice deviation contour points; (d) deviation profile feature line fitting

Fig. 11. Compensation path planning and results. (a) Compensation path; (b) morphology of compensated sample; (d) surface point cloud after compensation;(d) calculation of flatness error