Fig. 1. Schematic diagram of STXM

Fig. 2. Photograph of on-site closed-loop test system

Fig. 3. Overall structure diagram of SSRF STXM system

Fig. 4. Two-dimensional diagram of SSRF STXM system

Fig. 5. Three-dimensional hardware structural diagram of FZP and Sample closed-loop system

Fig. 6. Two-dimensional physical diagram of FZP and Sample closed-loop system

Fig. 7. Vibration analysis diagram of closed loop test system (a) Vibration data, (b) Spectrum

Fig. 8. Information flow diagram of the closed-loop control system

Fig. 9. Block diagram of the internal sensor replaced by laser interferometer to realize the closed-loop control

Fig. 10. The following performance of piezoelectric motor for sinusoidal signals with different frequencies

Fig. 11. Vibration suppression effects using internal sensor for closed-loop control under static conditions (a) Vibration data, (b) Spectrum

Fig. 12. Custom AquadB signal output IP core in FPGA

Fig. 13. Line chart of RMS values of the vibration vary with the AquadB clock periods

Fig. 14. Comparison of vibration suppression effect between internal closed loop (X) and system closed loop (Y) of piezoelectric motor (a) Vibration data, (b) Spectrum

Fig. 15. Comparison of vibration suppression effects between laser interferometer closed loop and internal sensor closed loop (a) Vibration data, (b) Spectrum