Fig. 1. Schematic of SEM nanomanipulation system

Fig. 2. Dispersed deposition of ZnO nanowires and Ag nanoparticles

Fig. 3. Schematic of assembly-interconnection-testing of nanowires. (a) Probe contact the nanowires; (b) assembly of nanowires and nanocluster; (c) solder irradiated by electron beam; (d) double-probe test of I-V curve

Fig. 4. Flowchart of nanomanipulation

Fig. 5. Ag nanoclusters under different time irradiated by electron beam. (a) 0 min; (b) 2 min; (c) 3 min; (d) 4 min

Fig. 6. Imaging before and after irradiation. (a) Imaging before irradiation; (b) Inlens detection mode after irradiation; (c) SE2 detection mode after irradiation

Fig. 7. Assembly and interconnection of nanowires-solders. (a) Original location of nanowires; (b) assembly of nanowires; (c) finding suitable nanoclusters; (d) assembly of nanoclusters; (e) interconnection joints before irradiation; (f) interconnection joints after irradiation

Fig. 8. Comparison of interconnect structures with different sizes before and after irradiation. (a) 200 nm; (b) 243 nm; (c) 290 nm

Fig. 9. Electrical test of nanowires after brazing. (a) Electrical properties of brazed nanowires after double probe test; (b) I-V test result