Fig. 1. Design concept of M-TPP. (a) Schematic diagram of traditional multi-focus TPP system. (b) Schematic diagram of M-TPP system. (c) Printing process of an array of 3D micro/nanostructures using an MFM. (d) Contrast diagram of the conventional objective lens and the MFM. Figure reproduced from ref.¹⁷, John Wiley and Sons.

Fig. 2. DLW lithography and laser cutting using metalenses. (a) Schematic of the DLW lithography system. (b) Grating patterns produced by DLW with the FZL and the SCLs. (c) Schematic of the thermal drift effects of the SiC metalens (left) and the traditional objective lens (right). (d) Cross-sectional images of 4H-SiC substrates after 60 minutes of laser cutting with a 15 W, 1030 nm laser. Figure reproduced from (a, b) ref.¹⁸, under the terms of the Creative Commons CC BY license; (c,d) ref.¹⁹, John Wiley and Sons.