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Acta Optica Sinica, Volume. 31, Issue 11, 1122004(2011)

Design of Beam Expanding Unit for Illumination System of DUV Lithography

Zhao Yang*, Gong Yan, and Zhang Wei
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    Article index updated: Mar. 10, 2025

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    Zhao Yang, Gong Yan, Zhang Wei. Design of Beam Expanding Unit for Illumination System of DUV Lithography[J]. Acta Optica Sinica, 2011, 31(11): 1122004

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    Paper Information

    Category: Optical Design and Fabrication

    Received: Apr. 21, 2011

    Accepted: --

    Published Online: Oct. 12, 2011

    The Author Email: Yang Zhao (juventus-xx@126.com)

    DOI:10.3788/aos201131.1122004

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology