Fig. 1. Photograph of the femtosecond laser processing system

Fig. 2. Relationship between maximum energy density and ablation aperture square at different repetition frequencies

Fig. 3. Morphologies of quartz cutting groove surface under different laser single pulse energies. (a) E_p=11.8 μJ; (b) E_p=35.4 μJ

Fig. 4. Depth and width of quartz cutting micro groove under different laser energies

Fig. 5. Design and cutting results of quartz resonant device. (a) Resonant device design drawing; (b) initial trial machining of workpieces; (c) separating devices after processing and cleaning