Acta Optica Sinica, Volume. 44, Issue 5, 0504001(2024)

Optimal Design of Charge-Free Layer InGaAs/Si Avalanche Photodetector

Juan Zhang, Er Yao, and Shaoying Ke*
Author Affiliations
  • Key Laboratory of Light Field Manipulation and System Integration Applications in Fujian Province, College of Physics and Information Engineering, Minnan Normal University, Zhangzhou 363000, Fujian , China
  • show less
    Figures & Tables(12)
    3D structural diagram of charge-free layer InGaAs/Si APD
    Effect of different dielectric materials in the grooved ring on the charge-free layer InGaAs/Si APD. (a) Current; (b) current at 95%Vb; (c) avalanche voltage
    Changes of recombination rate of charge-free layer InGaAs/Si APD with media. (a) Section diagram of recombination rate structure; (b) recombination rate curves taken at X=16.229
    Changes of electron and hole concentrations of charge-free layer InGaAs/Si APD with media. (a) Electron concentration in structural section; (b) hole concentration in structural section; (c) electron concentration at X=16.229; (d) hole concentration at X=16.229
    Effect of different dielectric materials in the grooved ring on the charge-free layer InGaAs/Si APD. (a) Conduction band of bonding interface; (b) valence band of bonding interface; (c) charge concentration
    Effect of different dielectric materials in the grooved ring on the charge-free layer InGaAs/Si APD. (a) Impact ionization rate (RIIR) of structural section; (b) impact ionization rate at X=16.229; (c) electron ionization coefficient at X=16.229; (d) hole ionization coefficient at X=16.229
    Variation of electric field in the charge-free layer InGaAs/Si APD with media. (a) Electric field of structural section; (b) electric field at X=16.229
    Variation of InGaAs/Si APD gain with media. (a) Gain curves; (b) gain at 95%Vb
    3 dB bandwidth curves of InGaAs/Si APD without charge layer
    Variation of electron and hole rates in the charge-free layer InGaAs/Si APD at X=16.229 with media. (a) Electron rate; (b) hole rate
    Gain-bandwidth product of charge-free layer InGaAs/Si APD
    • Table 1. Parameters of groove ring filling materials

      View table

      Table 1. Parameters of groove ring filling materials

      Serial numberMaterialDielectric constant
      1Air1.0
      2SiO23.9
      3Si3N47.5
      4Al2O39.3
      5HfO222.0
      6Ta2O526.0
    Tools

    Get Citation

    Copy Citation Text

    Juan Zhang, Er Yao, Shaoying Ke. Optimal Design of Charge-Free Layer InGaAs/Si Avalanche Photodetector[J]. Acta Optica Sinica, 2024, 44(5): 0504001

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Detectors

    Received: Oct. 24, 2023

    Accepted: Dec. 29, 2023

    Published Online: Mar. 19, 2024

    The Author Email: Ke Shaoying (syke@mnnu.edu.cn)

    DOI:10.3788/AOS231693

    CSTR:32393.14.AOS231693

    Topics