Semiconductor Optoelectronics, Volume. 45, Issue 2, 242(2024)

Low-cost Preparation and Study on the Performance of Amorphous Oxide Thin-film Transistors with A Top-gate Coplanar Structur

YUE Lan1,2 and MENG Fanxin3
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    References(18)

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    [4] [4] Lim W, Kim S, Wang Y L, et al. High-performance indium gallium zinc oxide transparent thin-film transistors fabricated by radio-frequency sputtering[J]. J. of the Electrochemical Society, 2008, 155(6): H383-H385.

    [5] [5] Lan L F, Xu M, Peng J B, et al. Influence of source and drain contacts on the properties of the indium-zinc oxide thin-film transistors based on anodic aluminum oxide gate dielectrics[J]. J. Appl. Phys., 2011, 110(10): 103703.

    [6] [6] Lin W K, Liu K C, Chen J N, et al. The influence of fabrication process on top-gate thin-film transistors[J]. Thin Solid Films, 2011, 519(15): 5126-5130.

    [7] [7] Seo S J, Yang S C, Ko J H, et al. Stability of solutionprocessed zinc tin oxide thin film transistors [J].Electrochemical and Solid-State Lett., 2011, 14(9): H375-H379.

    [8] [8] Juhyeok L, Dae S C. Heterojunction oxide thin film transistors: A review of recent advances[J]. J. Mater. Chem.C, 2023, 11(6): 5241-5256.

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    [14] [14] Jeong Y, Bae C, Kim D, et al. Bias-stress-stable solutionprocessed oxide thin film transistors [J]. ACS Appl.Materials and Interfaces, 2010, 2(3): 611-615.

    [15] [15] Ahn C H, Kong B H, Kim H, et al. Improved electrical stability in the Al doped ZnO thin-film-transistors grown by atomic layer deposition [J]. J. of the Electrochemical Society, 2011, 158(2): H170-H173.

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    [17] [17] Tohsophon T, Wattanasupinyo N, Silskulsuk B, et al.Effect of aluminum and indium co-doping on zinc oxide films prepared by DC magnetron sputtering[J]. Thin Solid Films,2011, 520(30): 726-729.

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    YUE Lan, MENG Fanxin. Low-cost Preparation and Study on the Performance of Amorphous Oxide Thin-film Transistors with A Top-gate Coplanar Structur[J]. Semiconductor Optoelectronics, 2024, 45(2): 242

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    Paper Information

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    Received: Oct. 13, 2023

    Accepted: --

    Published Online: Aug. 14, 2024

    The Author Email:

    DOI:10.16818/j.issn1001-5868.2023101301

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