Effects of AlN Interlayer on Growth of GaN Films on Silicon Substrate

Liu Junlin; Xiong Chuanbing; Cheng Haiying; Zhang Jianli; Mao Qinghua; Wu Xiaoming; Quan Zhijue; Wang Xiaolan; Wang Guangxu; Mo Chunlan; Jiang Fengyi

doi:10.3788/aos201434.0231003

Acta Optica Sinica, Volume. 34, Issue 2, 231003(2014)

Effects of AlN Interlayer on Growth of GaN Films on Silicon Substrate

Liu Junlin^*, Xiong Chuanbing, Cheng Haiying, Zhang Jianli, Mao Qinghua, Wu Xiaoming, Quan Zhijue, Wang Xiaolan, Wang Guangxu, Mo Chunlan, and Jiang Fengyi

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Liu Junlin, Xiong Chuanbing, Cheng Haiying, Zhang Jianli, Mao Qinghua, Wu Xiaoming, Quan Zhijue, Wang Xiaolan, Wang Guangxu, Mo Chunlan, Jiang Fengyi. Effects of AlN Interlayer on Growth of GaN Films on Silicon Substrate[J]. Acta Optica Sinica, 2014, 34(2): 231003

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Paper Information

Category: Thin Films

Received: Aug. 28, 2013

Accepted: --

Published Online: Jan. 21, 2014

The Author Email: Junlin Liu (liujunlin@ncu.edu.cn)

DOI:10.3788/aos201434.0231003

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology