Spectroscopy and Spectral Analysis, Volume. 42, Issue 7, 2056(2022)
Characteristics of Extreme Ultraviolet and Debris Emission From Laser Produced Bi Plasma
[1] Harned N, Wagner C[D]. Nat. Photonics, 4, 24(2010).
[2] Schupp R, Sheil J, Torretti F et al[D]. Nat. Commun, 11, 2334(2020).
[3] Bayraktar M, Liu F, Torretti F et al[D]. J. Phys. D: Appl. Phys, 53, 055204(2020).
[4] Versolato O O[D]. Plasma. Sources. Sci.Technol, 28, 083001(2019).
[5] Huang Q S, Kruijs R V D, Medvedev V et al[D]. Appl. Phys. Rev, 4, 011104(2017).
[6] Dinger U[D]. 2014 International Workshop on EUV and Soft X-Ray Sources Dublin, Ireland, November 3-6, 94(2014).
[7] Rudolf D, Schmitz C, Wilson D et al[D]. Appl. Phys. Lett, 108, 234101(2016).
[8] Barkusky F, Bayer A, Döring S et al[C]. Proceedings of SPIE, 7361, 736112(2009).
[9] Juschkin L, Sidelnikov Y, Tobin I et al[D]. Appl. Phys. Lett, 102, 203504(2013).
[10] Dunne P, Kambali I, Scally E et al[D]. J. Phys. D: Appl. Phys, 46, 495104(2013).
[11] Liu L, O’Reilly F, O’Sullivan G et al[D]. Opt. Express, 25, 9974(2017).
[12] George S, Munsee J H[D]. J. Opt. Soc. Am. B, 2, 1258(1985).
[13] Brage T, Brant J C, Wahlgren G M et al[D]. Astrophys. J, 551, 520(2001).
[14] Churilov S S, Joshi Y N[D]. Phys. Scripta., 63, 363(2001).
[15] Higashiguchi T, Li B W, Wu T et al[D]. J. Phys. B: At. Mol. Opt. Phys, 49, 035001(2016).
[16] Hara H, Kawasaki H, Tamura T et al[D]. Opt. Lett, 43, 3750(2018).
[17] Arai G, Kondo Y, Tamura T et al[D]. Opt. Lett, 43, 2042(2018).
[19] O’Gorman C, Otsuka T, Yugami N et al[D]. Appl. Phys. Lett, 100, 141108(2012).
[20] Harilal S S, Tao Y, Tillack M S et al[D]. Opt. Lett, 31, 2492(2006).
[21] Freemana J R, Harilala S S, Sizyuka T et al[D]. SPIE Extreme Ultraviolet (EUV) Lithography Ⅲ San Jose, California, February 13-16, 8322(2012).
[22] Song X L, Tian Y, Xie Z et al[D]. AIP. Advances, 6, 035108(2016).
[23] Lebert R, Mißalla T, Phiesel C et al[D]. International Workshop on EUV Lithography Maui, Hawaii, June 17, 31(2015).
[24] Harilal S S, Polek M P, Roy A et al[D]. Phys. Plasmas, 21, 033109(2014).
Get Citation
Copy Citation Text
Zhuo XIE, Hai-jian WANG, Yin-ping DOU, Xiao-wei SONG, Jing-quan LIN. Characteristics of Extreme Ultraviolet and Debris Emission From Laser Produced Bi Plasma[J]. Spectroscopy and Spectral Analysis, 2022, 42(7): 2056
Category: Orginal Article
Received: Apr. 29, 2021
Accepted: --
Published Online: Nov. 16, 2022
The Author Email: