Improved Dual-Frequency On-Line Phase Measuring Profilometry Based on Full-Cycle Equal Phase-Shift Algorithm

Kuang Peng; Yiping Cao; Yingchun Wu

doi:10.3788/AOS201939.0412012

Acta Optica Sinica, Volume. 39, Issue 4, 0412012(2019)

Improved Dual-Frequency On-Line Phase Measuring Profilometry Based on Full-Cycle Equal Phase-Shift Algorithm

Kuang Peng¹, Yiping Cao^2、*, and Yingchun Wu³

¹ Hubei Key Laboratory of Ferro & Piezoelectric Materials and Devices, Faculty of Physics & Electronic Sciences, Hubei University, Wuhan, Hubei 430062, China;

² Department of Opto-Electronics, Sichuan University, Chengdu, Sichuan 610064, China

³ School of Electronic and Information Engineering, Taiyuan University of Science and Technology, Taiyuan, Shanxi 0 30024, China

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Figures & Tables(9)

Fig. 1. On-line 3D measurement system based on full-cycle equal phase-shift algorithm

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Fig. 2. Dual-frequency fringe pattern

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Fig. 3. Extracted modulation patterns in simulation. (a) Measured object; (b) first deformed fringe pattern; (c) spectral distribution of first deformed fringe pattern; (d) modulation pattern corresponding to first deformed fringe pattern

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Fig. 4. Simulated reconstruction. (a) First deformed fringe pattern after pixel matching; (b) second deformed fringe pattern after pixel matching; (c) reconstructed object; (d) error distribution

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Fig. 5. Simulated reconstruction obtained with different methods. (a) Spectrum of first deformed fringe pattern after pixel matching obtained with filtering method; (b) first low-frequency component fringe pattern obtained with filtering method; (c) reconstructed object obtained with filtering method; (d) error distribution obtained with filtering method; (e) reconstructed object obtained with the method in Ref.[14]; (f) error distribution obtained with the method in Ref.[14]

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Fig. 6. Experimental setup

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Fig. 7. Reconstruction experiment. (a) Measured object; (b) first deformed fringe pattern; (c) modulation pattern corresponded to first deformed fringe pattern; (d) first deformed fringe pattern after pixel matching; (e) reconstructed object; (f) cross section at y=320 pixel

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Table 1. Reconstruction errors obtained with three methods
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Table 1. Reconstruction errors obtained with three methods
Method Maximum error /mm Root-mean-square error /mm
Proposed method 0.1930 0.0308
Filtering method 1.7119 0.1008
Method in Ref.[14] 1.1671 0.2272

Table 2. Measurement errors of planes with height of 3 mm obtained with three methods
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Table 2. Measurement errors of planes with height of 3 mm obtained with three methods
Method Proposed method Filtering method Method in Ref.[14]
Average height of measurement /mm 2.95 2.89 2.93
Root-mean-square /mm 0.081 0.151 0.221

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Kuang Peng, Yiping Cao, Yingchun Wu. Improved Dual-Frequency On-Line Phase Measuring Profilometry Based on Full-Cycle Equal Phase-Shift Algorithm[J]. Acta Optica Sinica, 2019, 39(4): 0412012

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