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Acta Optica Sinica, Volume. 33, Issue 12, 1234001(2013)

Carbon Contamination Modeling on Extreme Ultraviolet Optic Surfaces

Lu Guoqing1,2、*, Lu Qipeng1, Peng Zhongqi1, and Gong Xuepeng1
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    Article index updated: Mar. 10, 2025

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    Lu Guoqing, Lu Qipeng, Peng Zhongqi, Gong Xuepeng. Carbon Contamination Modeling on Extreme Ultraviolet Optic Surfaces[J]. Acta Optica Sinica, 2013, 33(12): 1234001

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    Paper Information

    Category: X-Ray Optics

    Received: May. 3, 2013

    Accepted: --

    Published Online: Nov. 19, 2013

    The Author Email: Guoqing Lu (ods888@163.com)

    DOI:10.3788/aos201333.1234001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology