Fig. 1. Optical path diagram of optical system based on variable speed scanning of galvanometer

Fig. 2. Schematic of speed and light field distribution in variable speed scanning process of galvanometer

Fig. 3. Laser quenching optical system based on variable speed scanning of galvanometer

Fig. 4. Control interface

Fig. 5. Diagram of laser quenching process

Fig. 6. Maximum temperature distributions along scanning direction

Fig. 7. Temperature rise curves at central nodes

Fig. 8. Light field distributions under different variable speed coefficients. (a) q＝0; (b) q＝0.2; (c) q＝0.4; (d) q＝0.6；(e) q＝0.8

Fig. 9. Hardened layer distribution after scanning under different variable speed coefficients

Fig. 10. Light field distributions in different scanning areas. (a) (0，10，0); (b) (0.5，9.0，0.5); (c) (1，8，1); (d) (2，6，2); (e)(4，2，4)

Fig. 11. Hardened layer distributions in different scanning areas

Fig. 12. Microhardness curves of hardened layers after laser quenching

Fig. 13. Homogenization areas of hardened layers after laser quenching. (a) q＝0; (b) q＝0.2; (c) q＝0.4; (d) q＝0.6；(e) q＝0.8