Journal of Infrared and Millimeter Waves, Volume. 26, Issue 5, 336(2007)
DEVELOPMENT OF MONOLITHIC 128×1 UN-COOLED VANADIUM OXIDE MICRO-BOLOMETER FOCAL PLAN ARRAY
[3] [3] Wood R A.Uncooled thermal imaging with monolithic silicon focal plan[J].SPIE,1993,2020:322-329
[4] [4] Mottin E.Amorphous Silicon Technology Improvement at CEA/LETI[J].SPIE,2002,4650:138-149.
[6] [6] Hideo Wada,Mitsuhiro Nagashima.Fabrication process for 256×256 bolometer-type uncooled infrared detector[J].SPIE,1997,3224:40-51.
[7] [7] Yang Zhao,Mingyao Mao.Opto-mechanical un-cooled infrared imaging system design,micro-fabrication and performance.[J],J.Microelectromechanical Systems,2002,11(2):136-146.
[8] [8] Ay F,Andinli A.Comparative investigation of hydrogen bonding in silicon based PECVD grown dielectrics for optical waveguide.[J],Optical Materials,2004,26:33-46.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. DEVELOPMENT OF MONOLITHIC 128×1 UN-COOLED VANADIUM OXIDE MICRO-BOLOMETER FOCAL PLAN ARRAY[J]. Journal of Infrared and Millimeter Waves, 2007, 26(5): 336