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Journal of Infrared and Millimeter Waves, Volume. 41, Issue 1, 2021218(2022)

Influence of oxygen partial pressure on the optical properties of β-Ga2O3-δ films deposited by pulsed laser deposition

Liu-Meng LI1, Bin ZHOU1, Li-Chen GAO1, Kai JIANG1, Liang-Qing ZHU1, Jin-Zhong ZHANG1、*, Zhi-Gao HU1,2,3、*, and Jun-Hao CHU1,2,3
Author Affiliations
  • 1Technical Center for Multifunctional Magneto-Optical Spectroscopy（Shanghai），Engineering Research Center of Nanophotonics & Advanced Instrument（Ministry of Education），Department of Materials，School of Physics and Electronic Science，East China Normal University，Shanghai 200241，China
  • 2Collaborative Innovation Center of Extreme Optics，Shanxi University，Taiyuan 030006，China
  • 3Shanghai Institute of Intelligent Electronics & Systems，Fudan University，Shanghai 200433，China
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    Liu-Meng LI, Bin ZHOU, Li-Chen GAO, Kai JIANG, Liang-Qing ZHU, Jin-Zhong ZHANG, Zhi-Gao HU, Jun-Hao CHU. Influence of oxygen partial pressure on the optical properties of β-Ga2O3-δ films deposited by pulsed laser deposition[J]. Journal of Infrared and Millimeter Waves, 2022, 41(1): 2021218

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    Paper Information

    Category: Research Articles

    Received: Jul. 6, 2021

    Accepted: --

    Published Online: Apr. 18, 2022

    The Author Email:

    DOI:10.11972/j.issn.1001-9014.2022.01.022

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology